Hi y'all

I am trying to make some resistor on my Silicon wafers.  I am thinking
of using TaN --  here are my questions -- hope you can help:

1)  Any vendor in Silicon valley that can do the film for me?
2)  Do people normally do a lift-off or wet/dry etch on the film?
3)  I am thinking of putting the metal layer after the TaN --
       is that the correct order?  Do I need to do any sort of
       plasma clean before I deposit the metal on top the TaN
       to make contact?
4)  Should I passivate the TaN with a dielectric?


Thanks,
Zard