durusmail: mems-talk: HNA Si etching
HNA Si etching
2010-01-26
2010-01-27
HNA Si etching
Jiho Song
2010-01-26
Hey all,

Does anyone know how to control HNA Si etching when you have to
mold your device side with polymer?

HNA reacts with polymer and it is difficult to control etching Si by itself.

Please let me know if you have any suggestions?

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Great day,
-- Jiho Song
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