Hi,

I am afraid that ion beam etching won't work for 300um. It would be
nice if you can deposite the Titanium with some kind of mould to get a
vertical slope. Otherwise, no etchant would give you a vertical
profile even for a few microns.

Best regards,
Fei

2010/1/26, leiwangsdu :
> Dear helene viatge
>
>          I used the EDTA wet etch for titanium film. But you know that wet
> etching is isotropic
> and tilted sidewalls were always obtained. If you need vertical sidewalls,
> maybe you can try
> the ion beam etching (milling).
>
> Yours sincerely,
>
> Lei Wang

--
Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Denmark
Tel:  +45 4525 6311
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Email: fei.wang@nanotech.dtu.dk
       http://www.nanotech.dtu.dk