durusmail: mems-talk: Etch Rates for Micromachining Processing
Etch Rates for Micromachining Processing
Etch Rates for Micromachining Processing
Sven TS Holmström
2010-01-27
Vitaley,

On Tue, Jan 26, 2010 at 10:24 PM, Vitaley Zaretskey  wrote:
> I have found "Etching in Microsystem Technology" by Michael Köhler
> (ISBN-13: 978-3527295616) to be a useful reference on etchants and
> etch rates

I looked up the book now and it seems very useful! Strange that I
couldn't find it on my own. Thanks for the help.

Sven
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