Jong:

I think MicroChem carries these Polymide strippers. Also have you thought
about using NEXTREL RIE system they have excellent selectivity between
Polymides and metals/oxides/dielectrics. If you need more information please
let me know.

Regards
Jayant
**********************************************************
Jayant Neogi
Director: Research and Development
NORSAM Technologies
Ph#  (503) 640-0586
Fax# (503) 640-8117
************************************************************
-----Original Message-----
From: Jong In Song 
To: MEMS@ISI.EDU 
Date: Monday, October 26, 1998 10:48 AM
Subject: Polyimide stripper


>I have been looking for a polyimide stripper that can resolve a cured
>polyimide (commercial products from Ciba Geigy  285 and Dupont PI 25XX
cured
>~250 C for ~ 1hr).  I used  such product manufactured by Ciba-Geigy
(product
>number: QZ????) a long time ago (~ 6 year ago) while I was in the States.
I
>was told that Ciba-Geigy discontinued the product and another company
became
>a new  manufacturer of it.  Does anybody know which company produce such
>products ?   The QZ???? did not attack  materials used for semiconductor
>device processing such as semiconductors (Si, GaAs, InP, etc), dielectrics
>(Silicon dioxide, nitride), and metals (Ti, Ni, Pt, Au, etc) at all.
>
>I would really like to appreciate your help on this matter.
>
>Best wishes,
>Jong-In Song
>
>Associate Professor
>Dept. of Information and Communications
>Kwangju Institute of Science and Technology (K-JIST)
>572 Sangam-dong Kwangsan-ku
>Kwangju, Korea 506-712
>tel) +82-62-970-2208
>fax) +82-62-970-2204
>
>
>