Have you asked Novellus about this?  Most vendors will provide baseline
recipes for their equipment.

Dan

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Chongfei Shen
Sent: Thursday, February 04, 2010 6:34 PM
To: General MEMS discussion
Subject: [mems-talk] a-Si recipe using Novellus concept-1 PECVD

Dear all,

We want to use Novellus concept-1 PECVD to deposit a-Si. Does anyone
have
experience with this machine and could provide a basic recipe to start
with?

Thank you very much.

Tom