durusmail: mems-talk: How to electroplate uniform metal on a 4inch wafer?
How to electroplate uniform metal on a 4inch wafer?
2010-02-11
How to electroplate uniform metal on a 4inch wafer?
Will Yu
2010-02-11
Dear all,

I tried to electroplate metals on a 4 inch wafer.
The current was applied with one alligator clip
clamped on the edge of  the wafer. However,
the metal was very un-uniform with the edges
much thicker than the center. Does anyone
know how to improve the uniformity in this
case? Any suggestion is appreciated.

Thanks,
Will
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