durusmail: mems-talk: Spin-on-glass
Spin-on-glass
2010-03-05
Spin-on-glass
Nathan McCorkle
2010-03-05
Can you specify which product you are using?

On Wed, Feb 24, 2010 at 5:13 AM,   wrote:
> Hi all,
>
> I am planning to use spin-on-glass. Could you tell me if there are any
> process tricks to cover highly non-planar devices like adjusting viscosity,
> coating rpm etc.?
>
> Furthermore I need a SiOx of very low thermal conductivity. Could you tell
> me any supplier which meets my requirements?
>
> Thank you in advance
>
> * Dr. Daniel Grimm
> * IFW Dresden
> *            - Institute for Integrative Nanosciences -
> * E-Mail:  d.grimm@ifw-dresden.de
> * Phone: +49 351 4659-314
> * Mobile: +49 177 4926561

--
Nathan McCorkle
Rochester Institute of Technology
College of Science, Biotechnology/Bioinformatics
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