Hi Karolina, I also use Alcatel DRIE machine and standard Bosch process with Al mask. I applied a 3-um thick PR as front-side protection material after performed front-side etching. Actually it works. But I met some problem when releasing the BOX layer. Sometime the thin BOX film just broke and the device got damaged. Have you ever seen such a structure releasing problem? Do you have any suggestion? Very much appreciate it! Li. Zhang --------- Graduate Student Edward P. Fitts Department of Industrial and Systems Engineering North Carolina State University Raleigh, NC 27695-7906 USA TEL: (919) 413-5459 Email: lzhang13@ncsu.edu Web: http://www.ise.ncsu.edu http://www.nnf.ncsu.edu