Hi folks, i have a question concerning Tridecafluor-1,1,2,2-tetra-hydrooctyl-trichlorosilane (TDTS). Before we do softlithography with PDMS, our wafers are covered with vapour of this chemical. Sometimes, there are wafers that are not needed anymore. without the tdts the su-8 structures on it can be easyly removed with Caro's acid. That doesn't work for TDTS covered wafers - they are highly resistant. Does anyone know how to remove this silane, so that the wafer can be reused? Thanks in advance! Lukas Bogunovic Bielefeld University - Biophysics and applied Nanoscience Germany bogunovic@physik.uni-bielefeld.de