Hi Karolina, Actually, I also plan to apply vapor phase HF etch for SiO2 release since I got device damaging problem with wet HF etching. Currently I'm still keeping with wet HF but working on different approaches. I heard from people, some flip over SOI wafer upside down and hang it over concentrated HF. They use this as alternative approach for vapor phase HF etching. Li -- Li. Zhang --------- Graduate Student Edward P. Fitts Department of Industrial and Systems Engineering North Carolina State University Raleigh, NC 27695-7906 USA TEL: (919) 413-5459 Email: lzhang13@ncsu.edu Web: http://www.ise.ncsu.edu http://www.nnf.ncsu.edu