Hi All,

i would need a couple of informations related to mask aligners (Karl Suss,
EVG, others ???)

1) For my application i would precisely align the mask features with wafer
flat. Tipically wafers are loaded in a mask aligner and pre-aligned with a
"flat finder" system. Which is the tipically accuracy of commercial
mask-aligners in the alignment of mask to wafer flat ?

2) what is the typical resolution of angular movements of a mask aligner ?

I have already asked for such information from mask aligner suppliers and I'm
waiting
for an answer. I would like to also have feedack from users.

Best regards,
Andrea