O2 plasma with a large ICP power won't work? On Thu, Jun 17, 2010 at 11:28 AM, Tingjie Liwrote: > Hi All, > > Does anyone know how to carry out isotopic etching on negative photoresist? > Thank you so much! > > -- > Best Regards/ > Gary Li > The University Of Western Ontario > 1151 Richmond Street > London, Ontario,Canada > N6A 5B9 * Zou Jie (Jay) * Department of Physics * University of Florida * Tel: +1-352-846-8018 * Email: zoujiepku@gmail.com * Homepage: http://plaza.ufl.edu/zoujie/