Hi everyone. I currently have BCl3 and CF4 on my ICP/RIE system. Does anyone know of an effective BCl3 + CF4 selective plasma etch recipe for GaAs/AlGaAs? I would like to know gas ratio, chamber pressure, rf frequency, etc. to recreate your results as best as possible. I've seen many journals online, but I can only find recipes for BCl3 + SF6. Thanks for your input in advance!