Hi Chen,

I think you can round the corners by annealing the silicon NW in hydrogen.

BR,

YN WANG

> Date: Tue, 3 Aug 2010 10:16:20 +0800
> From: cyyfq0808@gmail.com
> To: mems-talk@memsnet.org
> Subject: [mems-talk] lithography fin etch to define silicon NW
>
> Dear all,
>
> I am using lithogrphy and etching process to define silicon NW.
> the cross section is close to a square (70nm*70nm).
> I am wondering whether there is any way to smooth the edge of NW to make the
> cross section like a circle or semicicle, which means I want to make a round
> instead of a sharp edge at least on the top surface.
>
> any comments are welcome.
>
> sincerely
>
> Yu CHEN