what is the MEMS technology used to make a pressure polymer sensor?
What is the polymer used? Can we avoid this micromachining process to make
this sensor? Which is the packaging adapted to use this sensor in water
(another membrane acting on an oil fluid?)?

Could you give me title or publications about this subject?

Thanks in advance,

M.Eric ZIEGEL
52 Avenue Alsace Lorraine
38000 Grenoble FRANCE