durusmail: mems-talk: Spin on glue?
Spin on glue?
Spin on glue?
James Paul Grant
2010-08-11
Hello all,

Does anyone know of a permanent spin on 'glue' that is temperature
stable (up to 140oC), KOH resistant, transparent and is not attached by
acetone?

It might help if I explain why I require such a glue:

I'd like to permanently bond a lithium niobate wafer to a slicon wafer.
The Lithium niobate wafer will then be lapped down to a thickness or
around 10 microns. Next I would like to etch a 1 mm by 1 mm window in
the silicon structure such that the 10 microns of lithium niobate is
essentially free standing.

Has anybody got any experience of such a technique?

Any comments are most welcome.

James

--
Dr. James Paul Grant
Postdoctoral Research Associate
Microsystems Technology Group
74 Oakfield Avenue Room 5
University of Glasgow
Glasgow
Scotland
G12 8LS

Telephone: +44(0)141 330 6690

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