I tried to do selectivity etch P+(bulk) and to stop on the P-(EPI) for image sensor thinning process, I do etch rate expirments while I measure delta Silicon thickness from both sided, I get Etch rate for P+ 1mic/min and for EPI 0.5mic/min, according t litterature EPI ER should be very less. These exprments I do in lab while I pu one peace of silicon on cup of HF:Nitric:Acetic 1:3:8. Maybe I should do here electrochemical etching ? to get good selectivity.