Hello,
   Our RIE 800 chamber cover is extremely dirty (for GaN etching), and we
soak it for a few days with Acetone. but the Acetone does not rinse the
coated materials at all. The Oxygen cleaning does not work either.
   Please give any advice to cleaning the Chamber cover, especially the
sidewall.

--
BR.
Dept. of EEE., CYC712,
University of Hong Kong.