Hello, Removal can be done in a O2 plasma (recipe: 60min 1000W 130°C) Best regards, Peter Kuijpers MiPlaza Technology Laboratories Philips Research Europe High Tech Campus 04 Postbox HTC-4-1 5656 AE Eindhoven The Netherlands Tel.: +31 402743667 +31 612507027 Email: p.e.m.kuijpers@philips.com -----Original Message----- From: mems-talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org [mailto:mems- talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org] On Behalf Of Bhargav Nabar Sent: Friday 1 October 2010 18:33 To: mems-talk@memsnet.org Subject: Re: [mems-talk] AMMT KOH etch wafer holder Thank you for your suggestion Mr Kuijpers. Could you please comment on ease of removal of the parylene layer. What solvent do you use and does it require any agitation (slow rotating or ultrasonic?). Also how was you experience with the silicet clamp? Thank you once again. Bhargav Nabar UT Arlington Nanofab