durusmail: mems-talk: Poly properties at Cryo. temperatures
Poly properties at Cryo. temperatures
1999-01-09
Poly properties at Cryo. temperatures
Shivalik Bakshi
1999-01-09
Dear MEMS Researchers,

Could anyone point me to published info. on material properties (mechanical and
electrical) of polysilicon at cryogenic temperatures (around 40 Kelvin)

Thanks,
Shivalik


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