durusmail: mems-talk: Wafer holder/protector for backside during wet etching
Wafer holder/protector for backside during wet etching
2010-11-04
Wafer holder/protector for backside during wet etching
Joseph Peach
2010-11-04
Hello MEMS community,

I'm looking to order a wafer holder to protect the backside of wafers during
various wet etches. I have seen the AMMT "single series" wafer holders and
also an option from Silicet, "basic-g". Does anyone have experience using
either of these, or any other wafer holder? Any recommendations for which
might be better? I noticed that the specification sheat for the AMMT states
that "the holder tolerates wafers with a thickness of +/- 80um around the
specified target thickness", and I am processing 1mm as well as 500um
thickness wafers, so I was wondering if the Silicet option also has similar
limitations? Finally, both options are also from Europe, is the US provider
for wafer holders that for whatever reason just isn't coming up in my google
searches? (it would just would be nice to save time/money on shipping and so
I can more easily call them...)

Thanks in advance,
Joseph Peach
University of Washington
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