durusmail: mems-talk: Increasing value of an integrated capacitor
Increasing value of an integrated capacitor
2010-11-17
Increasing value of an integrated capacitor
Christian Engel
2010-11-17
Hello people,

what I want to do: Bonding two slices of glass, each with a size of about
1cm². One piece will have an etched cavity.
On both inner planes there will be metallic electrodes, positioned towards
each other, building a simple capacitor.

By the given geometrical dimensions there is no possibility for reaching the
desired capacitance of about 200pF (Space between the electrodes would be
<3µm. That's precious little.) Furthermore no dielectric is available except
O2 (of course). Are there any known geometric structures or other ways for
increasing the value of my capacitor? An external discrete SMD-capacitor is
the last possibility I want to attempt.

Many thanks in advance, Chris



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