Use vacuum vapor prime for resist adhesion. Good adhesion for 20 minutes of HF etching. Bill Moffat -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems- talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Grimm, Dr. Daniel Sent: Thursday, November 18, 2010 1:34 AM To: General MEMS discussion Subject: Re: [mems-talk] AZ5214E and anodic bonding Hi Yan Xin, normally I have not very good results using AZ5214 in HF etching processes due to adhesion problems. After some time (~1/2 min), HF tends to lift the resist (depending on your surface preparation). Furthermore, AZ5214 is not resistant against penetration of HF through the resist - you'll get partly exposed surfaces after a couple of minutes. We use ARP-3510, or even better, ARP-3100 (both from Allresist) for long HF etching processes. I think you burn your resist at 400°C and you might not be able to remove it afterwards. Best Daniel