Hi guys:

     I am looking for a heating blanket sheet for in-situ heating. Pretty
much like the silicon heating blanket. But I hope it can be more solid (with
metal surface like the hot plate) and the temperature should be able to rise
up to 180 degree C.  Would be better is controllable.

     size of a 3" wafer.

Anyone has ideas about the vendors that provide such kind of thing?

Thanks


Xavier from UT