Hello,
could you give me more information about KMER resist ?
Do you have also more information about using H3PO4 with resist. In your mail, I
don't find the e-mail of this indian guy
(-Ashutosh-) who said that resist resits to H3PO4.  I would like to have more
information about this process.  Because,
usually I use boiling H3PO4 to etch Si3N4 and resist don't stand it.

best regards
Danick Briand