Hello Arno, Have you tried using adhesion promoter? (HMDS,...) Best regards, Edouard Duriau CS-ABS Imaging Engineer ASML On Thu, Jan 20, 2011 at 1:56 PM, Steckenborn, Arno < arno.steckenborn@siemens.com> wrote: > Hello, > > Has anyone experience in improved adhesion of photoresist on Gold-surfaces > for plating of Gold ? After change of resist we experience poor adhesion and > undergrowth followed by delamination and flaking. > > Thanks in advance > Arno