Hi Meng,

Could you please tell us a bit more about your organc substrate?

Ed

*Edouard Duriau*|* ASML Netherlands BV *|* CS-ABS Imaging Systems*
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On Wed, Feb 9, 2011 at 3:31 AM, Meng Gang  wrote:

> Dear all,
>
> Is it possible to make ~100 nm pattern on organic substrate by
> top-down route?
>
> Can we draw pattern on organic substrate by EBL? (Cr layer was deposited
> before spin coating electron resist to make sure the conductivity of
> substrate. )
> If it can work, can we transfer the EBL pattern to organic substrate by
> RIE?
>
> Do you have the experience or good suggestion?
>
> Thanks a lot!
>
> Meng Gang