You will find all the details in the web given below:
http://fatmac.ee.cornell.edu/~defish/avstalk/lookup.cgi?num=2&action=0

Regards
Ranga
----- Original Message -----
From: 
To: 
Sent: Wednesday, May 19, 1999 8:15 AM
Subject: Bosch process


> I am interested in Si deep trech etch using Bosch process.
> Is there anyone that knows the patent number about Bosch process.
>
> Thank you.
>
> Dongwan Kim
>