Using standard positive resist up to 40 microns thick so far. As precise as 0.08 microns dimension, ammonia reversal. Side wall angles +/- 22 degrees from vertical. Bill Moffat -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Xiaohui Lin Sent: Wednesday, February 23, 2011 1:52 PM To: General MEMS discussion Subject: [mems-talk] Image Reversal resist We are currently looking for a kind of resist that can form 6-8um THICK NEGATIVE angle on substrate. AZ9260 is able to provide thick resist but the developed shape is of positive angle. AZ5214 if using image reversal, is able to provide negative angle but its thickness is always less than 2um. I am just wondering if AZ9260 able to process with image reversal process? Any other choice?