durusmail: mems-talk: Sacrificial layer for InP/InGaAs
Sacrificial layer for InP/InGaAs
2011-02-25
Sacrificial layer for InP/InGaAs
kang ding
2011-02-25
Hi,

We are looking for sacrificial layer for InP/InGaAs. It needs to be lattice
matched to InP and have high wet etch selectivity over both InP and InGaAs in
certain chemical.

Does anyone have an idea?

Thank you.

Kang
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