durusmail: mems-talk: electroforming high aspect ratio structure
electroforming high aspect ratio structure
2011-03-21
2011-03-23
electroforming high aspect ratio structure
Tsoll Doiiu
2011-03-23
Hmm, I can suggest that for 100 um height you shouldn't use LIGA.

My experience is kind of opposite: prepare THB photoresist pattern, order Ni
plating in some company at Daedok Valley (I cant remember name) and than PMMA
molding.
For features 100/20 THB should be good, and it can be removed from Ni mold
easilly.
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