Aarthi, That sounds like a very thick layer for seed. Have you tried hard bake/descum in RIE O2 plasma before wet etch? Regards, Glenn -----Original Message----- From: Aarthi Lavanya Dhanapaul [mailto:cqtald@nus.edu.sg] Sent: Monday, April 04, 2011 8:31 PM To: mems-talk@memsnet.org Subject: [mems-talk] Silicon etch I have been trying to remove a 1 micron thick Chromium seed layer using commercially available chrome etchant. But I find the etching is not uniform, even though there is agitation as well as heating been done. And my structures on top of chromium ends up being messy. Can any one suggest a better alternative or suggestions. Thanks Aarthi