durusmail: mems-talk: SU8 Processing
SU8 Processing
2011-04-19
2011-04-19
2011-04-22
SU8 Processing
DEBASHIS MAJI
2011-04-22
Hi,

Thanks for the suggestion. In any case is it possible to get those
structures ( i.e. single side over exposed and opposite side under exposed )
if the UV source is slightly tilted ? I was wondering about this since this
could be possible as our system is very old and the UV source is bit
loosened up.

Any further suggestions would be highly appreciated.

Thanks in advance.

Debashis Maji



2011/4/19 첸로 

> Dear Debashis Maji,
>
> I had the same problems weeks before.
>
> I suggest you reduce the space between the SU-8 and mask which means it is
> not a good closed contact.
>
> Maybe it will work. In addition please do not reverse the mask sides. There
> is only one side which is applied the material if you use the film mask.
>
> Good luck
> Regards
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