My experience with extremely hard well water is vinegar to remove residue from coffee maker and cooking utensils, muriatic acid to clean toilet bowels ... Roger Shile -----Original Message----- From: mems-talk-bounces+rshile=nanoink.net@memsnet.org [mailto:mems-talk-bounces+rshile=nanoink.net@memsnet.org] On Behalf Of Ruiz, Marcos Daniel (SENCOE) Sent: Monday, June 13, 2011 10:13 AM To: General MEMS discussion; mems-talk@memsnet.org Subject: [mems-talk] Contact-free cleaning of limestone on FS/Ta2O5substrates Unfortunately, dried liquid residue (water spots) is notoriously difficult to remove. I would recommend Summa Clean (basically a soapy mixture) and agitation in a megasonic or ultrasonic tank - as aggressive as your samples can handle. Dan Ruiz