Dear MEMS-group,

we want to make some very thin SiN cantilevers, using the Stoers Hoen's method.
Since we only have little experience in growing thin films we need some advice.

First we need a reliable (and fast) vendor for <110> Si wafers with a SiO2
layer of about 100 nm thickness. The only companies we know are Silicon Quest
Int. and International Wafer Services. Has anyone (positive or negative)
experience with these or other companies?

Next step to grow a 30 nm low stress SiN3 layer on top of it. This is the point
we have absolutely no experience with. Either we can grow the layer by
ourselves at Stanford NanoFab or send the wafers to a commercial lab for
processing. Has anyone experience in growing thin *low stress* SiN3 layers?