Hi everybody,

I want to use PMMA (with underlayer of copolymer) for E-beam writing over an
insulating substrate (most probably glass). In order to make it possible I'm
going to deposit copper on top of PMMA. After exposure I'm going to get rid
of copper prior to development, by immersing the thing in FeCl3 solution in
water. It dissolves copper really quickly. However I'm wondering if that
will affect PMMA (both exposed and non-exposed). I'm not concerned with Fe
or Cl - I'll wash them away with water.

If anybody knows something about PMMA-FeCl3 interactions, I'll appreciate an
answer.

Jarek

Jaroslaw Syzdek
Ernest Orlando Lawrence Berkeley National Laboratory
Environmental Energy Technologies Division
Advanced Energy Technology
1 Cyclotron Road MS70R0108B Room 193
Berkeley, CA 94720-8168 (GMT-8)
United States of America
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www.lbl.gov
http://eetd.lbl.gov/staff/syzdek-j.html
https://sites.google.com/a/lbl.gov/jarek/