durusmail: mems-talk: small batch wafer processing for wet chemistry
small batch wafer processing for wet chemistry
2011-09-01
2011-09-02
2011-09-02
small batch wafer processing for wet chemistry
Kevin Nichols
2011-09-02
I've used A.M. Quartz to get quartz carriers made. They'll make
whatever size you want. There are lots of other quartz fabs out there
too, but I've had good luck with them. http://www.amquartz.com/

On Thu, Sep 1, 2011 at 5:07 PM, Sarah McQuaide  wrote:
> Does anyone know of a manufacturer of small (5 or 10 slot) wafer cassettes
> for wet chemical processing? I realize most tooling is built for industry
> standard 25-wafer cassettes, but I am only inquiring about wet chemical
> baths as processing in smaller containers with smaller cassettes would save
> us a lot of dollars in chemicals.
>
> Thanks in advance.
>
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