durusmail: mems-talk: Background signal in anodically bonded glass silicon
Background signal in anodically bonded glass silicon
2011-09-19
Background signal in anodically bonded glass silicon
David Lee
2011-09-19
Dear All,

My current project involves detection of fluorescently labeled DNA molecules in
a microfluidic channel. The microfluidic channel was etched in silicon substrate
and anodically bonded with a glass cover. The problem I am running into is that
there is a significant background in the red channel (633 nm excitation). The
background seemed to be associated with the bonding process. There was no
significant red background in the silicon or glass substrate before bonding and
the background was only in the bonded area. For bonding strength and yield
issues, I would like to stick with anodic bonding. For other reasons, I cannot
switch the fluorescence detection wavelength.

So my questions are, has anyone else run into this problem and how did you solve
it?

Thanks.

David
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