after the hard bake of the SU-8 you should not expect it to be flexible
this bending is due to internal stresses in the film after development and
baking.

On Mon, Sep 26, 2011 at 7:08 PM, sumit kalsi  wrote:

> Dear All,
>
> I want to use a sheet of SU8 (<=50um) in my design, hence I have used LOR
> for releasing it from the glass substrate. But after the release, SU8 sheet
> (50um) was curved and it was not flexible (it broke when i tried bringing
> the two edges of SU8 sheet square together). Is it supposed to be behaving
> this way? Has anyone had any experience on this? Thanks a ton in advance!
>
>
> Kind Regards,
> Sumit