durusmail: mems-talk: Silicon anisotropic wet etching simulator
Silicon anisotropic wet etching simulator
2011-10-31
Silicon anisotropic wet etching simulator
Andrea Mazzolari
2011-11-01
You may try
http://tfy.tkk.fi/~mag/VisualTAPAS/Home.html

Best regards,
Andrea

> Hello everyone,
>
> Can someone recommend a simulator for anisotropic wet etching on off-cut
> Si wafers? Any suggestion will be very much appreciated!
>
> JJ Hu
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