durusmail: mems-talk: Cross section view of SEM image
Cross section view of SEM image
2011-11-07
2011-11-07
2011-11-08
2011-12-15
2011-12-15
Cross section view of SEM image
ning xue
2011-11-07
Hi,

I am planing to have a look at the cross section of my deep silicon etching
sample by SEM. I found that it is really difficult to manually cut the
slicon sample right along the diameter of the etcher hole. Is there any
good way to cut the wafer nicely and the cut side goes through the center
of etched hole?

Thanks
Ning
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