Hi et. al, I've cleaned my sample with RIE (20sccmO2+75W+80mT) and finally my sample is very clean! Thanks a lot. One more question, Is it possible that this process will damage my sample? 2011/11/9 Judith Linacero Blanco> What is RCA cleaning? > Today I proved during 1 hour with NMP sonicate, but I have something in my > sample!! > Tomorrow I'll try with NMP at 80ÂșC. If my sample is not cleaned, then I > use RIE with O2, but I'm afraid if this process can modificated my sample! > Best regards, > > 2011/11/8 Jorge Ramiro > >> Hi Judith, >> >> Have you tried a RCA cleaning? The first step, SC1, removes organic >> contaminants. >> Other options are using a "piranha" etch or an oxygen plasma. >> Best regards, >> >> Jorge Ramiro