Hi,

I use AZ4620 as a sacrificial layer and deposit a Cr/Au layer on top of
patterned 10-15 micron thick AZ4620 by RF sputtering. When I remove the samples
from the sputtering chamber I can clearly see that the metal film is cracked in
50-100 micron size pieces completely ant that affects the reflection from the
surface. Sometimes I see very rough wrinkles on the film.

Has anyone faced this problem and how can I overcome this issue? What may cause
this crack or wrinkle issue?

NSadi