Dear Everyone, I measure gradually increasing Young's modulus in silicon nitride cantilevers during resonant aging. The cantilever beams are driven on resonant frequency at reasonably low amplitude for days. The size of the beam is approx. 100x20x0.3 micrometer. I would expect lower Young's modulus due to cracks, instead of stiffening. Did anyone measure the same tendency, or can help me understanding this behavior? Thanks in advance. Robert Kazinczi