durusmail: mems-talk: IC damage during anodic bonding
IC damage during anodic bonding
IC damage during anodic bonding
Dr. Roumiana Paneva
1999-06-09
Hello All,

We are looking urgently for advices and/or reprints from papers concerning
damages on ICs during Si/glass anodic bonding. Leakage currents on
p-n-junctions are from special interest. Any help will be deeply
appreciated. Thanks in advance.

        Dr. Roumiana Paneva

        X-FAB GmbH
        Haarbergstasse 61
        D-99097 Erfurt
        Deutschland
        Tel: (+49) 361 42 053 21
        FAX: (+49) 361 42 053 11


reply