The answer depends on what you want to do. I not currently a design software user but in past roles have been round this loop a few times. If you want a flexible multi-physics finite element package then Comsol is good (and cheap), however, my past experience was only CoventorWare could cope with contact electrostatics. The parameterised library elements with associated analytical models (Architect or MEMS+) available from Coventor is also very powerful, reducing simulation times dramatically to the point where you can do statistical analysis of process variations, etc. and predict yield / performance spread. Other options to consider include SoftMEMS, Intellisense and MEMSolver. Suggest you get trial licenses and compare them for what you want to do. Best regards, Mark McNie -----Original Message----- From: mems-talk-bounces+mark.mcnie=oxinst.com@memsnet.org [mailto:mems-talk-bounces+mark.mcnie=oxinst.com@memsnet.org] On Behalf Of Serhat Sevli Sent: 13 February 2012 18:32 To: mems-talk@memsnet.org Subject: [mems-talk] mems development software Hi at all, I am a phd student doing research on MEMS. Our laboratory is going to buy a design and test software. We came up with Comsol and Coventor. Which one do you suggest better?