C6H8O7:H2O2:H2O

You need to be careful when using citric acid:peroxide ratio.





-----Original Message-----
From: Xing Sheng [mailto:shengxingstars@gmail.com]
Sent: Wednesday, April 25, 2012 7:07 AM
To: mems-talk
Subject: [mems-talk] AlGaAs vs. GaAs wet etch

Hi all,

I am looking for a wet etching recipe to selectively etch away 50nm
Al_0.3Ga_0.7As layer on top of 200nm GaAs. I appreciate any useful suggestions.

Thanks!

------------------
Best regards,

Xing Sheng

2012-04-24
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gorusler ve bakis acisi gondericiye ait olup Aselsan A.S. resmi
gorusu olmak zorunda degildir.

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