durusmail: mems-talk: Foil sputtering targets?
Foil sputtering targets?
2012-07-02
Foil sputtering targets?
Alex Mellnik
2012-07-02
Hi,

I would like to sputter some rather expensive materials, and know that I
would never use even a 1/16" sputter target.  Has anyone ever sputtered
from a foil?  I know that some older sputtering systems used foils for
things like platinum and palladium, but I've never seen one in action.  I
was thinking about ordering a thin foil of the material and clamping it
around a dummy target.  Would this work, or would I need to indium-bond the
foil to the dummy target?  Thanks for any suggestions,

Alex
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