Try a combination of underetching and sub-micron continous C4F8 and SF6 etching Run one for a few seconds then run the other Repeat to achieve required depth Change relative duration of each to achieve required angle -----Original Message----- From: mems-talk-bounces+robert.fahey=invetech.com.au@memsnet.org [mailto:mems- talk-bounces+robert.fahey=invetech.com.au@memsnet.org] On Behalf Of alaa melhem Sent: Wednesday, 18 July 2012 5:03 AM To: mems-talk@memsnet.org Subject: [mems-talk] Slope feature!! Hi There, Is it possible to apply gray scale lithography on metal material like copper? I would appreciate if anyone tried that and would I get a thickness slope ending with some nanometers? Looking forward to get feedback. Thank you, Alaeddin _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk